Solid-state RF generators for semiconductor plasma applications

11th July 2017
Posted By : Alice Matthews
Solid-state RF generators for semiconductor plasma applications

Producer of high-performance radio frequency (RF) matching networks, RF power generators and gas flow management systems for semiconductor manufacturing, Reno Sub-Systems, has announced from SEMICON West the latest addition to its Precis Solid-State Generator portfolio. Capable of 1.6kW microwave output at 2.45GHz, the new Precis generator offers what the company claims to be the highest-power solid-state microwave generator available for semiconductor plasma applications.

The company’s approach to power generation fills a growing need for advanced subsystem technologies to keep the industry on pace with Moore’s law.

“For the first time in decades, subsystems are enabling new processes and future device generations,” said Bob MacKnight, CEO of Reno Sub-Systems. “The ultimate validation of our technology is that 80% of the top semiconductor device manufacturers and equipment makers have ordered Reno products.”

The Precis microwave generator delivers accurate, repeatable and stable µsec ramp times using a highly reliable solid-state architecture. The Precis’ microwave power control offers significantly better frequency control than comparable magnetron-based microwave generators. Eliminating ageing magnetron technology also reduces maintenance requirements, and thereby cost of ownership.

The Precis family of generators is the latest addition to Reno’s highly differentiated Velocity series EVC matching networks portfolio. Delivering better performance and process capabilities, the Velocity EVC matching network achieves ranges from 500W to 4.5kW with frequencies of 500kHZ to 40MHz.

Key features:

  • 1.6kW microwave output at 2.45GHz
  • Operates from 200/208, 3-phase, 50/60Hz VAC
  • Coaxial and waveguide output options
  • Serial and analogue communication
  • DeviceNet and EtherCAT communication options available
  • 19" rack mount design for ease of integration.

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